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Gas-sensing properties of alpha-Fe2O3 thin films prepared by plasma-enhanced chemical vapour deposition
Gas-sensing properties of alpha-Fe2O3 thin films prepared by plasma-enhanced chemical vapour deposition
1994
Baoshi Yan
Jianbo Peng
Chin Choy Chai
Keywords:
Analytical chemistry
Thin film
Electrostatic spray-assisted vapour deposition
Materials science
Inorganic chemistry
Combustion chemical vapor deposition
Plasma processing
Metalorganic vapour phase epitaxy
Plasma-enhanced chemical vapor deposition
Carbon film
Deposition (phase transition)
Correction
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