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Scaling of Hf-based high-k dielectrics
Scaling of Hf-based high-k dielectrics
2004
Marc Heyns
S. Beckx
Matty Caymax
J. Chen
Martine Claes
Bart Coenegrachts
Stefan De Gendt
Robin Degraeve
Annelies Delabie
W. Deweerd
Guido Groeseneken
Shigenori Hayashi
Kirklen Henson
Jacob Hooker
Michel Houssa
Thomas Kauerauf
A. Kerber
Dong Hwa Kwak
Rob Lander
Guilherme Lujan
Masaaki Niwa
Luigi Pantisano
Riikka L. Puurunen
Lars-Ake Ragnarsson
E. Rohr
Tom Schram
Yasuhiro Shimamoto
W. Tsai
Sven Van Elshocht
Johan Vertommen
Wilfried Vandervorst
S. Kubicek
Keywords:
Dielectric
Condensed matter physics
High-κ dielectric
Materials science
Scaling
Correction
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