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Reliability of a 300-mm-compatible 3DI technology based on hybrid Cu-adhesive wafer bonding
Reliability of a 300-mm-compatible 3DI technology based on hybrid Cu-adhesive wafer bonding
2009
Yu
Liu
Polastre
Chen
Shi
Perfecto
Klymko
Chace
Shaw
Dimilia
Kinser
Young
Purushothaman
Koester
Haensch
Keywords:
Reliability (semiconductor)
Wafer bonding
Composite material
Stress (mechanics)
Adhesive bonding
Silicon
Adhesive
Materials science
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