SOI CMOS compatible low-power microheater optimization and fabrication for smart gas sensor implementations

In this paper, an original design of a polysilicon loop-shaped microheater on a thin stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation (20.000/spl deg/C/W) and very low power consumption (20 mW for heating at 400/spl deg/C). Moreover, the use of completely CMOS compatible TMAH-based bulk-micromachining techniques allows an easy smart gas sensor integration in SOI-CMOS technology.