Thermal Cycle Durability of Heat-Shielding Coatings on the Basis of Zr-Y-O/Si-Al-N under Ion Treatment of Copper Substrates

By pulse magnetron deposition method the heat-shielding coatings on the basis of Zr-Y-O/ Si-Al-N layers on copper substrate are formed. Surface layer of copper substrate was treatment by the Zr+ ions. Structure-phase states were investigated by TEM, SEM, X-ray and SIMS. Thermal cycle durability of coatings is defined.