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Plasma Enhanced Atomic Layer Deposition of ZnO Ultra-Thin Films Monitored by In-Situ Spectroscopic Ellipsometry
Plasma Enhanced Atomic Layer Deposition of ZnO Ultra-Thin Films Monitored by In-Situ Spectroscopic Ellipsometry
2021
Ufuk Kılıç
Keywords:
Analytical chemistry
In situ
Atomic layer deposition
Plasma
Thin film
Materials science
spectroscopic ellipsometry
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