Method for manufacturing a polycrystalline semiconductor film, apparatus thereof, and image display panel

The present invention provides a method for producing a polycrystalline semiconductor film and the image display panel apparatus and, while the amorphous film by scanning while the laser beam is irradiated to crystallize the semiconductor, thereby preventing the illuminating beam when the polycrystalline semiconductor film strength projection distribution occurs. Light intensity (13) uniformly distributed laser beam to an optical system for irradiation in (5) to (8), arranged to be the causes of dog ears (16) of the diffracted light produced by the lens boundary ( 17, 18) is removed by removing the dog ear filter (15). Thus, by removing the dog ears distribution, it does not require the laser beam (13) blurred light intensity distribution, the distribution can maintain high energy efficiency, increase processing power.