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Liquid Transfer Imprint Lithography 를 이용한 금속산화물 나노구조체 형성
Liquid Transfer Imprint Lithography 를 이용한 금속산화물 나노구조체 형성
2016
이수옥
이재종
권순근
정상희
정미라
Keywords:
Lithography
Multiple patterning
Nanotechnology
Materials science
Next-generation lithography
Optoelectronics
liquid transfer
Correction
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