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Communication Orale : "PECVD silicon nitride membranes for gas separation at low and intermediate temperatures"
Communication Orale : "PECVD silicon nitride membranes for gas separation at low and intermediate temperatures"
2007
W. Kafrouni
Vincent Rouessac
Anne Julbe
Jean Durand
Keywords:
Silicon nitride
Membrane
Chemical engineering
Gas separation
Plasma-enhanced chemical vapor deposition
Materials science
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