Low Wobble Resonant Scanners

Laser scanning systems are finding increasing applications in commercial products, therefore new methods of generating high resolution scans at moderate frequencies and large amplitudes are constantly being researched. One at the most promising technologies to emerge employs low wobble-resonant scanners. Resonant scanners display all of the above performance characteristics and are available at a reasonable cost. There are two important types of low-wobble resonant scanners. The first has cross-flexure pivots and is designed for large mirrors (up to 40 mm diameter). The other uses two torsion bars, a smaller mirror (10 mm), and is intended for high volume applications. Principal applications, theories of operation, and performance of these scanners are discussed in this paper.