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ION IMPLANTED PIEZORESISTIVE CANTILEVER DESIGN AND PERFORMANCE
ION IMPLANTED PIEZORESISTIVE CANTILEVER DESIGN AND PERFORMANCE
2008
Sung-Jin Park
Ali J. Rastegar
T.H. Fung
A. Alvin Barlian
Joseph R. Mallon
Beth L. Pruitt
Keywords:
Optoelectronics
Materials science
Piezoresistive effect
Ion
Cantilever
piezoresistive cantilever
Correction
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