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Reduction of dislocation density in AlGaN using AlN templates patterned with nano-sized pillar shapes
Reduction of dislocation density in AlGaN using AlN templates patterned with nano-sized pillar shapes
2021
Tomoya Omori
Syunya Tanaka
Shohei Teramura
Moe Shimokawa
Ryota Hasegawa
Sho Iwayama
Hideto Miyake
Motoaki Iwaya
Tetsuya Takeuchi
Satoshi Kamiyama
Keywords:
Template
Materials science
nano sized
Dislocation
Semiconductor
Pillar
reduction
Optoelectronics
Correction
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