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Lithography Solutions in Novel High Frequency SiGe HBT Device
Lithography Solutions in Novel High Frequency SiGe HBT Device
2012
Lei Wang
Fucheng Chen
Bo Su
Donghua Liu
Zhigang Qian
Dunran Li
Honglin Meng
Xiaobo Guo
Wei Ji
ShengAn Xiao
Keywords:
Heterojunction bipolar transistor
Lithography
Electronic engineering
Materials science
Optoelectronics
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