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Glancing angle deposition of thin films : engineering the nanoscale
Glancing angle deposition of thin films : engineering the nanoscale
2014
Matthew M. Hawkeye
M.T. Taschuk
Michael J. Brett
Keywords:
Thin film
Deposition (law)
Chemical vapor deposition
Nanotechnology
Nanoscopic scale
Materials science
glancing angle deposition
Correction
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