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Impact of Film Morphology on Chemical Mechanical Polishing of Tungsten
Impact of Film Morphology on Chemical Mechanical Polishing of Tungsten
2016
Kun Xu
Shih-Haur Shen
Jason Garcheung Fung
Hassan G. Iravani
Ingemar Carlsson
Tzu-Yu Liu
Bogdan Swedek
Shou-sung Chang
Wen-Chiang Tu
Tomohiko Kitajima
Katrina Mikhaylich
Brian J. Brown
Sidney P. Huey
Fritz Redeker
Keywords:
Tungsten
Inorganic chemistry
Chemistry
Chemical-mechanical planarization
Morphology (linguistics)
Metallurgy
Correction
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