Arrays of AC-excited, silicon microdischarge devices as large as 40 000 (200×200) pixels: electrical and optical characteristics for operation in neon

Electrical characteristics of arrays of (50 /spl mu/m)/sup 2/ Si microplasma devices operating in 500-900 Torr of Ne are presented. Arrays as large as 200/spl times/200 pixels have been AC-excited at frequencies of 5-20 kHz and all exhibit reproducible ignition voltages and lifetimes. At 700 Torr, the power consumed per pixel for a 200/spl times/200 pixel array is 85/spl plusmn/2 /spl mu/W, 190/spl plusmn/2 /spl mu/W, and 290/spl plusmn/2 /spl mu/W for excitation frequencies of 5, 10, and 15 kHz, respectively, and 5.5, 12.0, and 17.8 mA, respectively, of total current (RMS) drawn by the array.