Self-Polarized PZT Thin Films: Deposition, Characterization and Application

The aim of this work is the characterization of self-polarized PZT thin films. The laser-intensity-modulation method (LIMM) was applied for the investigation of the self-polarization profile. Pyroelectric coefficient profiles were reconstructed from the pyrocurrent spectrum measured up to frequencies of 2 MHz using MATLAB-software containing algorithms for the inverse solution of the appropriate Fredholm integral equation and a Tikhonov regularization method for stable numerical solutions. Measurement uncertainties and resolution of this measurement technique are discussed. The application of self-polarized IR sensor arrays in presence detection and IR imaging is demonstrated.