Ferroelectric Lead Zirconate Titanate Films Prepared by Spray Pyrolysis of Carboxylate Solutions

Ferroelectric PbTi0.6Zr0.4O3films 0.5–1.5 μm in thickness were produced on platinum substrates by spray pyrolysis of carboxylate solutions. The optimized compositions of the precursor solutions, containing methacrylic acid and ethylene glycol, are stable under normal conditions, allow the annealing temperature to be reduced, and lead to higher quality film surfaces and large grains. The film exhibit the following electrical properties: TC= 360–460°C, emax= 1750 at TC , tan δ = 0.02–0.1 at 1 kHz and room temperature, Psmax = 18 μC/cm2 , Prmax = 15 μC/cm2at 50 Hz, and Ec= 42–120 kV/cm.