Based on high-precision measurement of differential flotation vertical adjustment mechanism

Based on high-precision measurement of differential flotation vertical adjustment mechanism, the ground belongs to the field of Physical Simulation. In order to solve the vertical movement mechanism measuring gas chamber pressure sensor measuring range is too large to bring the poor precision, non-linearity deviation and a corresponding increase of the problem, the flotation vertical adjustment mechanism by the vertical movement mechanism reference gas chamber pressure, absolute pressure sensor, relative pressure sensor structure, the vertical movement mechanism disposed next to which a reference pressure chamber, absolute pressure sensor disposed in the reference pressure chamber, the vertical movement mechanism by the air bearing outer vertical and vertical air bearing inner sleeve composed of vertical air bearing between the outer and inner sleeve of the air bearing vertical vertical gas chamber, relative pressure sensor disposed in the cavity between the vertical gas chamber and the reference pressure. The present invention uses when measuring the vertical movement mechanism absolute pressure reference pressure chamber absolute pressure and relative pressure superimposed manner with high accuracy can be achieved relatively good experimental results.