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Oxygen Enhanced Dissociation Effect on MOCVD PZT Thin Film
Oxygen Enhanced Dissociation Effect on MOCVD PZT Thin Film
1993
Shigeo Ohnishi
Masaya Komai
Kazuya Ishihara
Keizo Sakiyama Masaru Shimizu
Tadashi Shiosaki
Keywords:
Metalorganic vapour phase epitaxy
Oxygen
Nanotechnology
Thin film
Inorganic chemistry
Materials science
Chemical engineering
Dissociation (psychology)
oxygen enhanced
Correction
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