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Properties of low-temperature ALD Al 2 O 3 film by high purity ozone
Properties of low-temperature ALD Al 2 O 3 film by high purity ozone
2020
Takayuki Hagiwara
Ayaka Abe
Naoto Kameda
Ken Nakamura
Hidehiko Nonaka
Keywords:
Materials science
Chemical engineering
Ozone
Correction
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