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711 Influence of Disk Edge Profile on Scattering Characteristics of the Liquid Flow over the Rotating Disk in a Spin Coater
711 Influence of Disk Edge Profile on Scattering Characteristics of the Liquid Flow over the Rotating Disk in a Spin Coater
2013
Taichi Oseto
Mizue Munekata
Hiroyuki Yoshikawa
Kota Ono
Hiroaki Kurishima
Keywords:
Spin coating
Physics
Scattering
Optics
Materials science
liquid flow
Correction
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