Characterization of FeSix film by codeposition on β‐FeSi2 template

We report the characterization of FeSix (x∼3) thin film prepared by simultaneous electron beam evaporation of Fe and Si onto a β‐FeSi2 template at 250 °C. The in situ reflective high energy electron diffraction observation and ex situ cross‐section transmission electron microscope characterization of the as‐deposited film imply that the as‐deposited film has the structure similar to that of β‐FeSi2. But the spreading resistance measurement shows that the film is metallic. Auger electron spectroscopy suggests that the chemical environment of Fe atoms in the as‐deposited FeSix film is different from that in the annealed film (β‐FeSi2 film). We explain this paradox by assuming that the as‐deposited film has the crystal lattice similar to β‐FeSi2 but with ingredient disorder due to the low transport viscosity of Fe and Si atoms at this temperature.