Selective immobilization of 6HB and Tablet DNA origami Templates on microstructured surfaces by DLC and CF-polymer contrasting suitable for microfluidic integration

Abstract DNA origami method aims at the construction of nanometer sized bio-templates from a long single-stranded DNA molecule [1] , [2] . It allows to build a variety of different structures and functionalities arranged with a resolution of about 1 nm for devices like plasmonic antennas or optical waveguides [3] . Our contribution deals with the immobilization of DNA origami templates in well-defined micrometer structures on 6-inch silicon wafers aiming a large-scale fabrication. We present a process of surface structuring of hydrophobic diamond-like carbon and fluorocarbon–polymer layers onto hydrophilic SiO 2 . Further we introduce a procedure for selective DNA Origamis self-immobilization in these hydrophilic cavities