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Si Pillar Formation and Height Control by Furnace Oxidation of the Si (111) Surface with Ultra-Small SiN Nuclei
Si Pillar Formation and Height Control by Furnace Oxidation of the Si (111) Surface with Ultra-Small SiN Nuclei
1997
Takeshi Yamamoto
Tadashi Nagasawa
Kenji Murakami
Michiharu Tabe
Keywords:
Nanotechnology
Pillar
Inorganic chemistry
Chemistry
Chemical engineering
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