Адаптивное изменение массы модельных частиц при моделировании тлеющего ВЧ-разряда в силановой плазме

A method is proposed that enables to simulate the recombination of positive and negative ions in an accurate way, even at low densities. The recombination in a cell is done by changing the mass of superparticles in this cell. Thus it is possible to recombine any desired amount of real particles even if it is less than one superparticle. Moreover, the number of superparticles in each cell is kept nearly constant by adding zero-mass superparticles (if a cell has too few superparticles) or by removing a superparticle with the increase of mass for each in the rest of superparticles (if a cell has too many superparticles). It is shown that using this method a simulation of the ion recombination results in a lower level of non-physical fluctuations. The results of computations are compared to the experimental data and the results of hydrodynamical simulations.