Hétérogénéités de contraintes intragranulaires : détermination par approche couplée EBSD-Kossel

Electron back-scatter diffraction (EBSD) and Kossel microdiffraction are being co-developed as two complementary strain measurement techniques at the sub-micron scale, in view of mapping internal stresses in both structural materials and microelectronic components. The physical principles and geometries of these diffraction techniques are briefly presented, then strain measurement methodologies are introduced. Validation experiments and application are described.. Mots clefs : contraintes locales, Microscope electronique a balayage, diffraction, Kossel, EBSD