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Acemap > Paper > Study on the arcing mechanism in capacitively-coupled plasma = 축전 결합 플라즈마에서의 아킹 메커니즘에 대한 연구

Study on the arcing mechanism in capacitively-coupled plasma = 축전 결합 플라즈마에서의 아킹 메커니즘에 대한 연구

2015 
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