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PE-MOCVD of GeTe materials for Phase Change Memory Applications
PE-MOCVD of GeTe materials for Phase Change Memory Applications
2011
E Despiau-Pujo
L. Dussault
Corentin Vallée
E. Gourvest
D. Jourde
Sylvain Maitrejean
P. Michallon
Keywords:
Materials science
Phase-change memory
Optoelectronics
Metalorganic vapour phase epitaxy
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