Computer-Aided Fabrication of Integrated Circuits

Abstract : The major objective of this research program is to develop a Computer Aided Fabrication (CAF) environment to support the design, implementation, and manufacturing of processes for integrated circuits with special emphasis on prototyping and application specificity. The primary testbed for all components of the CAF system is the Integrated Circuits Lab at MIT. These components are the result of research in five areas: CAF system architecture; Modular process design; Scheduling of fabrication events; Equipment modeling; and Mechanical property TCAD. Computer aided design; VLSI; Integrated circuits; Three dimensional; Computer aided manufacturing. (edc)