Growth of diamond on silicon tips

Guang Yuan,Yaxue Jin,Chuan Jin,Bingyang Zhang,Huaping Song,Yongqiang Ning,Tianming Zhou,Haihe Jiang,Shuzhi Li,Yulian Tian,Changzhi Gu

Growth of diamond on silicon tips

1998

Guang Yuan
Yaxue Jin
Chuan Jin
Bingyang Zhang
Huaping Song
Yongqiang Ning
Tianming Zhou
Haihe Jiang
Shuzhi Li
Yulian Tian
Changzhi Gu

Abstract The diamond films with (1 1 1) orientation were grown on silicon-tip arrays by microwave-plasma chemical vapor deposition (MW–PCVD). The diamond was preferentially grown on the top of the tips, and it can be explained as an effect of chemisorption on surface.

Keywords:

Chemical vapor deposition
Thin film
Diamond
Plasma-enhanced chemical vapor deposition
Heterojunction
Material properties of diamond
Chemisorption
Inorganic chemistry
Chemistry
Silicon
Field electron emission
Crystallography
Optoelectronics
Mineralogy

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