Modeling of gas discharge plasmas: What can we learn from it?

Abstract This paper describes some of our modeling efforts for gas discharges, used for plasma surface engineering applications. Depending on the application, we use either a fluid approach or particle-in-cell—Monte Carlo (PIC—MC) models to simulate the plasma behavior. The examples shown in this paper include fluid modeling for nanoparticle formation in silane discharges and for nitrogen dielectric barrier discharges, as well as PIC—MC simulations for a magnetron discharge.