Device for adjusting the position of two components to each other

2000 
A device (1) serves for adjusting the position of two components (2a, 2b) to one another, in particular two carrier elements for optical elements such as mirrors or lenses, in particular as axial and / or angular manipulator for lithography lenses. The devices (2a, 2b) through a force (F, T) to each other adjustable. Each of the components (2a, 2b) has at least three joints (4a, 4b, 4c, 4d; 5a, 5b, 5c, 5d) on. Each of the joints (4a, 4b, 4c, 4d) of the one component (2a) via a respective lever element (6a, 6b, 6c, 6d) each having a corresponding articulation (5a, 5b, 5c, 5d) of the other component (2b) to a pair of joints (7a, 7b, 7c, 7d) respectively. Each of the joint pairs (7a, 7b, 7c, 7d) via a respective at least one lever (8a, 8b, 8c, 8d, 13, 13 ') and in each case at least one further articulation (9, 9'; 9a, 9b, 9a ' , 9b ') with the at least one lever (8a, 8b, 8c, 8d, 13, 13' is at least one of the adjacent pairs of joints (7a, 7b, 7c, 7d) connected).
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