Monte Carlo Simulations on Scattering of Bombarded Ions in Solids

By taking account of not only an elastic scattering but also an inelastic scattering, the Monte Carlo technique based on a single scattering model is applied to a simulation of the behavior of ion beam in the amorphous target. The calculations are carried out for the light ion beam mainly and the results show a fairly good agreement with the experiments on the range and the backscattering. Also ion trajectories are depicted on the chart by the plotter connected with the digital computer to get a direct view of the scattering processes in solids.