High resolution channeling STIM in a thin crystal
1991
Scanning Transmission Ion Microscopy (STIM) has been combined with Channeling Contrast Microscopy (CCM) to examine damage in a thin crystal (4 μm thick Si) with high spatial resolution (200 nm). Such measurements require very low beam currents (<1 fA), whereas the crystal was damaged only by relatively large currents (nA).
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