Structural and optical properties of MgxZn1−xO thin films grown by metal-organic chemical vapor deposition

Abstract High-quality Mg x Zn 1− x O thin films were successfully grown on c -plane sapphire substrates by metal-organic chemical vapor deposition. The c -axis oriented Mg x Zn 1− x O films were deposited on sapphire at the temperature of 600–630°C. The structural and optical properties of Mg x Zn 1− x O films were investigated using X-ray diffraction (XRD) and the transmittance spectrum. MgO phase separation was not observed with Mg content up to x =0.39. The optical band gaps of Mg x Zn 1− x O alloys (0⩽ x ⩽0.39) range from 3.3 to 3.95 eV.