Fabrication and optical characteristics of silicon-based two-dimensional photonic crystals with honeycomb lattice

Abstract We report on the fabrication and properties of quasi-two-dimensional photonic crystals (Phcs) with honeycomb lattices of dielectric rods in air. Photonic crystals, fabricated in silicon by electron beam lithography and dry-etching techniques, had the high aspect ratio of 12, corresponding to a rod height of about 7 μm . The optical transmission spectra of the samples measured in the 1.8–8 μm wavelength range, revealed pronounced features of photonic band dispersion, and a signature of a complete photonic band gap (PBG) centered at 2.3 μm wavelength.