Direct current planar excimer source

Excimer emission at 172?nm was observed from xenon discharges generated between a perforated anode, with opening dimensions in the sub-millimetre range, and a planar cathode. A thin dielectric layer 100?250??m in thickness, with the same size opening as the anode, is aligned with the anode opening and used to separate the electrodes. Devices with this structure are referred to as cathode boundary layer (CBL) discharge or micro-hollow cathode discharge devices, depending on the surface structure of the cathode. The emission intensity and efficiency of these devices are pressure- and current-dependent. Typical power densities and internal efficiencies (ratio of excimer radiant power to electrical input power) are 0.5?1.5?W?cm?2 and 3?5%, respectively. In the current range between normal and abnormal mode operation, the CBL discharge shows regularly arranged filaments (self-organization). Optimum emission of the excimer radiation is observed at the transition from the normal glow mode to self-organization. The resistive current?voltage characteristic in the self-organization region allows the operation of multiple CBL devices in parallel without individual ballast, but with an excimer emission slightly off the maximum value. The measured decrease of the excimer emission to about 10% of its initial value after approximately 250?h of continuous operation seems to be caused by the increasing contamination of xenon, through minor leaks in the discharge chamber and/or the outgassing of chamber components. Refilling the chamber with fresh gas after such an extended operation resulted in full recovery of the discharge with respect to excimer emission. The results suggest the possibility of generating extended lifetime, intense, large area, planar excimer sources using CBL discharges in sealed discharge chambers including getters.