Y 2 O 3 :Bi 3+ thin films prepared by radio frequency magnetron sputtering: Structural and optical studies

Abstract Y 2 O 3 :Bi 3+ thin films of various microstructures were deposited using different deposition times by means of a radio frequency magnetron sputtering system. The deposition time affects the surface morphology, crystalline phase and the optical properties of the Y 2 O 3 :Bi 3+ thin films. The films with the shorter and longer deposition time were amorphous and cubic in structure, respectively. The Bi 3+ ions in the cubic structure emitted in the broad blue band centered at 410 nm, while the amorphous structure also emitted in the green region.