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Extremely-Thin SOI for Mainstream CMOS: Challenges and Opportunities
Extremely-Thin SOI for Mainstream CMOS: Challenges and Opportunities
2010
Ali Khakifirooz
Kangguo Cheng
Arvind Kumar
Pranita Kulkarni
Shom Ponoth
Balasubramanian S. Haran
Sanjay C. Mehta
Jin Cai
A. Byrant
J. Kuss
Lisa F. Edge
Hemanth Jagannathan
Z. Ren
Alexander Reznicek
T. Adam
Hong He
A. Kimball
Sivananda K. Kanakasabapathy
S. Schmiz
Steven J. Holmes
Amlan Majumdar
Basanth Jagannathan
Daewon Yang
A. Upham
Soon-Cheon Seo
J. L. Herman
R. Johnson
Yu Zhu
P. Jamison
Zhengmao Zhu
L. H. Vanamurth
J. Faltermeier
S. Fan
D. Horak
T. Hook
Vijay Narayanan
Vamsi Paruchuri
Huiming Bu
D.K. Sadana
P. Kozlowsk
Bruce B. Doris
D. McHerron
Wilfried Haensch
M. Khare
E. Leobondung
J. O'Neil
Ghavam G. Shahidi
Keywords:
Mainstream
CMOS
Nanotechnology
Silicon on insulator
Materials science
Engineering
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