In2O3 nanofibers surface modified by low-temperature RF plasma and their gas sensing properties

Abstract Hierarchical structure In 2 O 3 nanofibers were synthesized by traditional electrospinning technology. Then, In 2 O 3 nanofibers were treated 30 min by using low-temperature RF oxygen plasma and hydrogen plasma, respectively. The morphology, structure, composition and element content of the In 2 O 3 nanofibers modified by oxygen plasma and hydrogen plasma were characterized and analyzed by XRD, SEM, BET and XPS. After modification by plasma, the morphology, structure and element contents of the In 2 O 3 nanofibers were significantly changed. Gas sensors were fabricated based on In 2 O 3 nanofibers modified by oxygen plasma and hydrogen plasma, respectively. Gas sensing properties of modified In 2 O 3 sensors were investigated by a static test system to a variety of VOC gases in the concentration range of 0.3–500 ppm. The test result shows that In 2 O 3 gas sensor modified by oxygen plasma exhibits excellent acetone sensing properties, It indicates that surface adsorption properties of In 2 O 3 nanofibers can be improved by surface modification technology using low-temperature RF plasma, so as to improve the gas sensing properties of sensors.