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Novel Stacked Nanodisk with Quantum Effect Fabricated by Defect-free Chlorine Neutral Beam Etching
Novel Stacked Nanodisk with Quantum Effect Fabricated by Defect-free Chlorine Neutral Beam Etching
2008
takeguti masaki
touboku takasi
igarasi makoto
uraoka gyou osamu
Qixian Huang
yamasita itirou
xigangxianyou
samukawa seizi
Keywords:
Chlorine
Optoelectronics
Etching
Beam (structure)
Materials science
Quantum Hall effect
defect free
Correction
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