Old Web
English
Sign In
Acemap
>
Paper
>
Ultraviolet light enhancement of Ta 2 O 5 dry etch rates
Ultraviolet light enhancement of Ta 2 O 5 dry etch rates
2000
K. P. Lee
H. Cho
R.K. Singh
S. J. Pearton
Christopher C. Hobbs
Philip J. Tobin
Keywords:
Materials science
Analytical chemistry
Dry etching
ultraviolet light
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]