Hybrid integration of VCSELs and microlenses for a particle detection microoptical system

We introduce the design and fabrication of a microoptical system of reduced dimensions, based on hybrid integration of commercial components (i.e. VCSELs and microlenses) through silicon micromachining. We demonstrate the feasibility of integrating these components with the aim of providing up to 4 collimated or focused laser beams. The application for this system will be the detection of microparticles in a 4 parallel measurement process.