Post-annealing in oxygen ambient for (Ba, Sr)TiO3 thin films prepared by pulsed laser deposition

Abstract Structural and electrical properties of (Ba 0.6 Sr 0.4 )TiO 3 thin films prepared by pulsed laser deposition were investigated to verify influences of post-annealing in oxygen ambient. Increase of post-annealing time in oxygen ambient resulted in not only grain growth but also improvement of crystallinity in BST films. Although the post-annealing in oxygen ambient resulted in the increase of surface roughness, it assisted the dielectric constant increase by eliminating oxygen vacancies. The electrical property enhancement including high dielectric constant and low leakage current density was associated with introducing high pressure of oxygen during the post-annealing.