Closed-loop high-precision position control system with two modes
2008
Based on fine optical grating and micrometer, one closed-loop high-precision position control system with two modes has been made. The system is used to control the optical elements moving in two ways. That is, one control mode is automatically control with optical grating feedback system and the other mode is manually control with micrometer. Under the support of conservative PID control algorithm, the precision of the system is up to ±0.1 μm while operating on automatically way, otherwise, the position precision is ±1μm.
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