УВЕЛИЧЕНИЕ ТЕРМОЦИКЛИЧЕСКОЙ СТОЙКОСТИ ПОКРЫТИЙ НА ОСНОВЕ Zr-Y-O, ПОЛУЧЕННЫХ МЕТОДОМ МАГНЕТРОННОГО ОСАЖДЕНИЯ

The coatings on the basis of Zr-Y-O with different Y concentration have been obtained by the method of magnetron sputtering in direct current and pulse mode. Chemical and phase composition of the coatings were studied by the methods of X-ray analysis and secondary-ion mass spectrometry. The influence of coating deposition mode on their thermal cycle resistance was determined.