A silicon carbide substrate skeleton igbt hydraulic pressure in the vacuum apparatus and method for fast aluminizing

The present invention discloses a silicon carbide substrate skeleton IGBT hydraulic pressure in the vacuum apparatus shortcut aluminized, comprising an upper punch, lower punch and cavity; said cavity comprising a body cavity and through the cavity; upper body half cavity aluminum was provided through lumen in communication with the inlet, the lower half body cavity is provided through the vacuum chamber in communication with the interface; punch through from top to bottom extending into said cavity, the upper punch projects into the through cavity a sealing ring portion of the ring; the lower punch through from the bottom extends into the cavity through the lower punch projects into the cavity portion is also provided with a ring seal; the lower punch head provided for loading the silicon carbide surface IGBT graphite skeleton frame substrate; when the upper punch enclosed aluminum injection port, a vacuum pump is closed at the interface of the punch, the distance between the upper punch and lower punch of 30mm ~ 40mm. The device can be realized using a silicon carbide substrate IGBT fast skeletal and double aluminized aluminum coated uniformly.