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The semiconductor device having a field effect transistor having a high dielectric constant gate insulating film
The semiconductor device having a field effect transistor having a high dielectric constant gate insulating film
2004
masaaki tanba
ka takasi harada
sigenori hayasi
Keywords:
High-κ dielectric
Optoelectronics
Field-effect transistor
Semiconductor device
Materials science
Dielectric
Correction
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