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Ultrathin diblock copolymer/titanium laminates - a tool for nanolithography
Ultrathin diblock copolymer/titanium laminates - a tool for nanolithography
1998
Joachim P. Spatz
Peter Eibeck
Stefan Mößmer
Martin Möller
Thomas Herzog
P. Ziemann
Keywords:
Nanolithography
Titanium
Copolymer
Materials science
Composite material
Nanotechnology
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